Novel Optoelectronic Methodology to Facilitate Development of MEMS

Ryszard J. Pryputniewicz, Ryan T. Marinis, Adam R. Klempner, and Peter Hefti

Abstract:	Development of microelectromechanical systems (MEMS), and structures they interact with, especially for navigation applications constitutes one of the most challenging tasks in today’s micromechanics. In addition to design, analysis, and fabrication capabilities, this task also requires advanced test methodologies for determination of functional characteristics of MEMS to enable verification as well as refinement and optimization of their designs. More specifically, development of MEMS requires sophisticated design, analysis, fabrication, testing, and characterization tools. These tools can be categorized as analytical, computational, and experimental. Solutions using the tools from any one category alone do not usually provide necessary information on MEMS and extensive merging, or hybridization, of the tools from different categories is used. One of the approaches employed in the development of MEMS, as well as other complex structures of contemporary interest, is based on a combined use of the analytical, computational, and experimental solutions (ACES) methodology. Development of this methodology was made possible by recent advances in optoelectronic methodology, which was coupled with the state-of-the-art computational methods, to offer a considerable promise for effective development of the design of MEMS. This approach facilitates characterization of dynamic and thermomechanical behavior of MEMS components, packages for MEMS, and other complex material structures. In this paper, we describe the novel optoelectronic methodology that facilitates development of MEMS and illustrate its use with representative examples by emphasizing their functional operation/characteristics, reliability, and durablity.
Published in:	Proceedings of the 63rd Annual Meeting of The Institute of Navigation (2007) April 23 - 25, 2007 Royal Sonesta Hotel Cambridge, MA
Pages:	726 - 734
Cite this article:	Pryputniewicz, Ryszard J., Marinis, Ryan T., Klempner, Adam R., Hefti, Peter, "Novel Optoelectronic Methodology to Facilitate Development of MEMS," Proceedings of the 63rd Annual Meeting of The Institute of Navigation (2007), Cambridge, MA, April 2007, pp. 726-734.
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