Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance

Chul Hyun, Jang Gyu Lee and Taesam Kang

Abstract:	This paper presents an oscillation loop for an INS (Inertial Navigation System) grade, surface micromachined differential resonant accelerometer. This resonant type sensor utilizes the electrostatic stiffness changing effect of an electrostatic actuator. This device produces a differential digital output upon an applied acceleration. A closed loop system called self-sustained oscillation loop is prerequisite for its operation as a resonant accelerometer. A self-sustained oscillation loop induces the system’s dynamic states into its primary mode, thus keeps track of its resonant state under applied acceleration or perturbation. For this, a simple selfsustained oscillation loop is designed and the feature of the loop is analyzed in the viewpoint of nonlinear dynamic system. The oscillation loop is regarded as a limit cycle. From the standpoint of feedback control system, both determination of resonance point and its stability analysis are required. In the actual system, which has several noise sources, noise
Published in:	Proceedings of IEEE/ION PLANS 2006 April 25 - 27, 2006 Loews Coronado Resort Hotel San Diego, CA
Pages:	594 - 598
Cite this article:	Hyun, Chul, Lee, Jang Gyu, Kang, Taesam, "Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance," Proceedings of IEEE/ION PLANS 2006, San Diego, CA, April 2006, pp. 594-598. https://doi.org/10.1109/PLANS.2006.1650649
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