Multi-Sensor Inertial Array Technologies for Advanced MicroSystems

Tracy Hudson, Sherrie Holt, Paul Ruffin, Jim McKee, Michael Whitley, Michael Kranz and Eric Tuck

Abstract:	This paper details the results of a three-year Army component technology development program, originating in 2003, to investigate the use of controlled arrays of MEMS sensors to provide full dynamic performance ranges, improved harsh environment tolerances, and improved reliability for miniature sensing systems, focusing on inertial applications. The prototyped devices focused on two technical challenges: 1) extending the performance range through the use of multiplexed sensor arrays, and 2) tightly-coupled sensors integration and feedback for control. Representative results are presented for two unique multiplexed accelerometer sensor arrays: one based on commercial-off-the-shelf (COTS) accelerometers and the other based on custom co-fabricated SOI MEMS accelerometers. Associated prototype electronics and data-merging algorithms, to demonstrate dynamic range expansion from 10^4 to 10^6, are also presented. Additionally, representative data in the investigation of tightly-coupled sensors integration will spotlight development of co-fabricated sensors for inertial applications that include an angular rate sensor, accelerometer array, and temperature sensors co-located on an individual SOI die.
Published in:	Proceedings of IEEE/ION PLANS 2006 April 25 - 27, 2006 Loews Coronado Resort Hotel San Diego, CA
Pages:	574 - 585
Cite this article:	Hudson, Tracy, Holt, Sherrie, Ruffin, Paul, McKee, Jim, Whitley, Michael, Kranz, Michael, Tuck, Eric, "Multi-Sensor Inertial Array Technologies for Advanced MicroSystems," Proceedings of IEEE/ION PLANS 2006, San Diego, CA, April 2006, pp. 574-585. https://doi.org/10.1109/PLANS.2006.1650647
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