MEMS Inertial Rate and Acceleration Sensor

Rand Hulsing

Abstract:	Development of the uSCIRAS (pronounced micro-Cyrus) multisensor over a period of over six years has produced a practical MEMS Inertial Measurement Uuit (IMU) suitable for tactical grade navigation aud guidance applications. Iterative improvements in silicon sensor design and bulk micromachining processes have matured to the point where a three-axis IMU with an attractive price/performance ratio is now producible. This paper sumarizes the design features and test results for an IMU with
Published in:	Proceedings of the 1998 National Technical Meeting of The Institute of Navigation January 21 - 23, 1998 Westin Long Beach Hotel Long Beach, CA
Pages:	161 - 168
Cite this article:	Hulsing, Rand, "MEMS Inertial Rate and Acceleration Sensor," Proceedings of the 1998 National Technical Meeting of The Institute of Navigation, Long Beach, CA, January 1998, pp. 161-168.
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