Development of a Piezoelectric-Driven Meso-Scale MEMS-Technology Gyroscope

John E. Jackson, Alton L. Highsmith, R.K. Pandey, and L.T. Wurtz

Abstract:	This paper reports the status of a University of Alabama research program to develop a MEMS-technology gyroscope. The FAA-sponsored program is an effort to support the goal of replacing all or part of ground-based navigation for general aviation. One way to achieve this is to develop a low-cost backup navigation system for GPS. To try to develop low-cost gyroscopes for such a system, researchers are focusing on MEMS technology. The UA research program investigates improving the accuracy of MEMS gyroscopes in three ways: (1) increase the mass of the gyro, that is, produce a meso-scale gyro using MEMS technology, (2) increase signal amplitude by using piezoelectric actuators and sensors (instead of conventional electrostatics), and (3) use alternatives to Silicon (for example, Quartz) that should reduce accuracy degradation caused by temperature changes. The design of the UA gyroscope includes some unique applications of MEMS technology, including some difficult MEMS fabrication challenges, which may be of use to others.
Published in:	Proceedings of the 17th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GNSS 2004) September 21 - 24, 2004 Long Beach Convention Center Long Beach, CA
Pages:	845 - 851
Cite this article:	Jackson, John E., Highsmith, Alton L., Pandey, R.K., Wurtz, L.T., "Development of a Piezoelectric-Driven Meso-Scale MEMS-Technology Gyroscope," Proceedings of the 17th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GNSS 2004), Long Beach, CA, September 2004, pp. 845-851.
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