Miniature MEMS Quartz IMU for Aerospace and Defense Applications

R. Jaffe, M. Carroll, P. Carter, A.M. Madni

Abstract:	BEI Technologies, Inc. has recently announced the separation of its Systron Donner Inertial Division subsidiary into two separate divisions: The Systron Donner Automotive Division (SDAD) and the Systron Donner Inertial Division (SDID). The new SDID has been formed to leverage the high volume, low cost automotive manufacturing capabilities for BEI's quartz MEMS technology for Aerospace and Defense (A&D) applications. The technology has come full circle from its inception in defense applications to a dramatic increase in production of automotive MEMS sensors. Most recently the company has developed a new inertial measurement unit, named Miniature MEMS Quartz IMU (MMQ-50TM). Quartz MEMS technology has been successfully applied to tactical grade IMUs and GPS/INS systems. This paper describes the Quartz MEMS sensors used in the MMQ and the MMQ itself. Performance data are also presented. The paper also addresses planned improvements in the sensors and systems for specific applications related to A&D. Portions of this paper are adapted from an earlier paper presented by Madni and Jaffe [1,2].
Published in:	Proceedings of the 16th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GPS/GNSS 2003) September 9 - 12, 2003 Oregon Convention Center Portland, OR
Pages:	2840 - 2850
Cite this article:	Jaffe, R., Carroll, M., Carter, P., Madni, A.M., "Miniature MEMS Quartz IMU for Aerospace and Defense Applications," Proceedings of the 16th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GPS/GNSS 2003), Portland, OR, September 2003, pp. 2840-2850.
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