Electrostatically Force-Balanced Silicon Accelerometer

Keith Warren

Abstract:	A low cost silicon accelerometer intended for use in tactical missile and Multisensor applications is presented. The proofmass, flexure, and frame structure are anisotropically etched from single crystal silicon using semiconductor batch processing to yield 109 devices per wafer. This small, rugged accelerometer has inherently high gas damping which is employed to eliminate structural resonances. The accelerometer chips have been assembled into triad housings along with hybrid preamp electronics for testing. Test data on 10-G full scale devices is presented, and 50-G range accelerometers are being developed.
Published in:	Proceedings of the 46th Annual Meeting of The Institute of Navigation (1990) June 26 - 28, 1990 Atlantic City, NJ
Pages:	185 - 191
Cite this article:	Updated citation: Published in NAVIGATION: Journal of the Institute of Navigation
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