Micromachined Quartz Sensors for Tactical Missions

Frederick Aronowitz, S.D. Hammons

Abstract:	Rockwell International is developing a small, low-cost iner- tial measurement unit (Ih4U) that would be suitable for tac- tical applications. The Digital Quartz IMU (DQI) is designed around an inertial sensor assembly (ISA) that is being jointly developed by Rockwell International and the Systron Donner Inertial Division of BEI. The ISA makes use of the advances in quartz micromachining for the fabrication of batch- processed inertial instruments: both gyros and accelerometers. The IMU also makes use of new digital signal processing techniques and has the capability to be integrated with GPS. This paper describes some of the current development and shows performance of both the quartz rate sensor (QRS) and the vibrating quartz accelerometer (VQA). Principles of operation are described and some design features of each sen- sor are discussed. Test data supporting the design goal of 1 deghr in the QRS and 1 mg in the VQA is presented.
Published in:	Proceedings of the 49th Annual Meeting of The Institute of Navigation (1993) June 21 - 23, 1993 Royal Sonesta Hotel Cambridge, MA
Pages:	401 - 410
Cite this article:	Aronowitz, Frederick, Hammons, S.D., "Micromachined Quartz Sensors for Tactical Missions," Proceedings of the 49th Annual Meeting of The Institute of Navigation (1993), Cambridge, MA, June 1993, pp. 401-410.
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