High Accuracy MEMS GPS/INS for Commercial Applications

T. Shiozawa, H. Kumagai

Abstract:	We have developed Micro Electro Mechanical System (MEMS) GPS/INS using micromachining technology, and its MEMS GPS/INS consists of three MEMS gyroscopes and MEMS accelerometers to measure angular rate and linear acceleration in a body mounted strapdown mechanization, and magnetic field sensor (MI sensor) to detect the geomagnetism for heading angle, and GPS Receiver to measure the position and velocity, and Blue tooth modular for remote communication. There exists a growing demand for reduce cost, size, power and high-g capabilities GPS/INS to meet the requirement of commercial application. In order to meet customer need, we adopt MEMS gyroscope and MEMS accelerometer. In recently, many MEMS type sensor are existed in the world, we adopt the vibrating gyroscope and currently developing MEMS accelerometer. Gyroscope and accelerometer are manufactured by balk-micro-machining process. Their sensing units are packaged individual and incorporate the driving circuit, so flexibility of size and volume requirement. MEMS GPS/INS is assembled in 2.5 inch cubic by Tamagawa seiki. MEMS gyroscope and MEMS accelerometer is improved the performance especially range and resolution. The Bias error of Roll and Pitch MEMS gyroscope are compensated by the traditional way of the Kalman filter between INS and GPS velocity signal. Additionaly the bias error of Yaw MEMS gyroscope and initial heading angle are compensated by the Kalman filter difference between INS and MI sensors signal. MI sensor is more sensitive than the hole IC or MR (Magnetic Resistance) sensor, and is efficient to sense the geomagnetic field to estimate the heading angle. MEMS GPS/INS navigates the human and measures the human movement of rehabilitation training and can provide the data for help of rehabilitation training.
Published in:	Proceedings of the 59th Annual Meeting of The Institute of Navigation and CIGTF 22nd Guidance Test Symposium (2003) June 23 - 25, 2003 Hyatt Regency Hotel Albuquerque, NM
Pages:	135 - 140
Cite this article:	Shiozawa, T., Kumagai, H., "High Accuracy MEMS GPS/INS for Commercial Applications," Proceedings of the 59th Annual Meeting of The Institute of Navigation and CIGTF 22nd Guidance Test Symposium (2003), Albuquerque, NM, June 2003, pp. 135-140.
Full Paper:	ION Members/Non-Members: 1 Download Credit Sign In