Thermal and Noise Characteristics of MEMS Inertial Sensors

W. Abdel-Hamid, N. El-Sheimy, G. Lachapelle

Abstract:	The last two decades have shown an increasing demand for low cost and miniature inertial sensors for many navigation applications. MEMS-based inertial sensors efficiently meet this demand. However, due to their lightweight and fabrication process, there are still some limitations on MEMS sensors performance which consequently affect the obtained accuracy and sensitivity of these sensors. This paper suggests two approaches to enhance the performance of MEMS-based sensors. First, by modeling the thermal variation of the basic parameters describing the performance characteristics of the sensors. Second, by utilizing signal de-noising technique based on Wavelet analysis to produce meaningful signal for studying the performance characteristics of the sensors. The results presented in this paper indicates that the first proposed approach is promising and can lead to better estimates of the sensors’ calibration parameters (bias and scale factor). Moreover, the second proposed approach has proved its efficiency in reducing the high frequency noise of the MEMS-based inertial sensors.
Published in:	Proceedings of the 2003 National Technical Meeting of The Institute of Navigation January 22 - 24, 2003 Disneyland Paradise Pier Hotel Anaheim, CA
Pages:	641 - 648
Cite this article:	Abdel-Hamid, W., El-Sheimy, N., Lachapelle, G., "Thermal and Noise Characteristics of MEMS Inertial Sensors," Proceedings of the 2003 National Technical Meeting of The Institute of Navigation, Anaheim, CA, January 2003, pp. 641-648.
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