Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations

David Lin, Robert Macdonald, Jeremy Popp, Matthew Alberda, Emad Andarawis, Marco Aimi

Abstract:	Abstract— GE Research has developed a low-cost inertial MEMS process flow to support navigation-grade inertial sensor fabrication called ‘Polaris’ process. With a total of six mask layers, GE Polaris features thick silicon on insulator (SOI) with a 20 to 200 ?m device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing at mTorr with through silicon via technology. The GE multiple-ring gyroscope (MRG) fabricated by the Polaris process has demonstrated navigation-grade performance with proven extreme-temperature reliability and successful integration to a MEMS IMU prototype. GE, through its GE Microfab is now offering Polaris as a foundry process, open to the PNT community. Keywords— MEMS Fabrication, Inertial Sensor, Navigation-grade
Published in:	2023 IEEE/ION Position, Location and Navigation Symposium (PLANS) April 24 - 27, 2023 Hyatt Regency Hotel Monterey, CA
Pages:	1 - 5
Cite this article:	Lin, David, Macdonald, Robert, Popp, Jeremy, Alberda, Matthew, Andarawis, Emad, Aimi, Marco, "Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations," 2023 IEEE/ION Position, Location and Navigation Symposium (PLANS), Monterey, CA, April 2023, pp. 1-5. https://doi.org/10.1109/PLANS53410.2023.10140000
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