Evolution of Low-Cost MEMS Inertial System Technologies

Richard S. Anderson, David S. Hanson and Anthony S. Kourepenis

Abstract:	MEMS continues to mature and enable the realization of many previously unachievable applications. Advanced microfabrication techniques have produced small, low- cost silicon inertial sensors of high performance, rugged- ness, and inherent symmetry that have been evaluated in automotive antiskid and traction control systems and in advanced guided munitions development programs. Continued advances in both the inertial sensor, applica- tion-specific integrated circuit (ASIC) electronics, and packaging technologies are required to realize low-cost inertial measurement units (IMU) for applications ranging from gun-launched guided munitions, guided missiles, personnel navigation, and autonomous vehicles. Addi- tional investment is also required in GPS receiver packag- ing technology to realize an integrated MEMS/GPS IMU that meets the overall performance, size, and cost goals of these applications. Draper Laboratory and the government have invested over $100M developing the pacing technologies to meet these systems needs. These investments will ultimately realize IMUs that are smaller (less than 3 in³), higher per- forming (1deg/h and less than 1 mg), and lower in cost (less than $1200/IMU) than is achievable in any compet- ing technology. This paper details the technology road- map for attaining this end objective, detailing the ad- vances achieved to date, and identifies the future ad- vances required in the sensor, electronics, and packaging arenas. Specific IMU designs and requirements will be presented to better convey the complex demands and ap- plications for this exceptional technology.
Published in:	Proceedings of the 14th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GPS 2001) September 11 - 14, 2001 Salt Palace Convention Center Salt Lake City, UT
Pages:	1332 - 1342
Cite this article:	Anderson, Richard S., Hanson, David S., Kourepenis, Anthony S., "Evolution of Low-Cost MEMS Inertial System Technologies," Proceedings of the 14th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GPS 2001), Salt Lake City, UT, September 2001, pp. 1332-1342.
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