Miniature Short-Term Navigation Grade Quartz MEMS Accelerometer

Sergey Zotov, Semen Shtigluz, John Paxton, and David Hoyh

Abstract:	EMCORE Corporation has demonstrated a new quartz micromachined accelerometer based on differential frequency modulation (FM) principle of operation. This development is based on the conventional EMCORE/Systron Donner quartz accelerometer, which used in SDI500 tactical grade IMU. Several design solutions have extended the performance of the device to achieve high-end tactical grade and in-run navigation grade. Experimental characterization of the accelerometer revealed velocity random walk of 500 nG/rt-hz (which is > 100 times better than EMCORE's current accelerometer), bias instability of 300 nG at stable ambient temperature. In parallel with lowering accelerometer’s noise characteristics, a new bias calibration method across dynamic temperature environments has been implemented. This approach enabled us to improve bias stability over dynamic temperature (-55 °C to +85 °C) to better than 100 uG (+\sigma), calibrated SF better than 20 ppm, and BW ~ 150 or 300 Hz.
Published in:	Proceedings of the 34th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GNSS+ 2021) September 20 - 24, 2021 Union Station Hotel St. Louis, Missouri
Pages:	1092 - 1107
Cite this article:	Zotov, Sergey, Shtigluz, Semen, Paxton, John, Hoyh, David, "Miniature Short-Term Navigation Grade Quartz MEMS Accelerometer," Proceedings of the 34th International Technical Meeting of the Satellite Division of The Institute of Navigation (ION GNSS+ 2021), St. Louis, Missouri, September 2021, pp. 1092-1107. https://doi.org/10.33012/2021.18038
Presentation Slides:	ION Members/Non-Members: 1 Download Credit Sign In