3D Dual-Shell Micro-Resonators for Harsh Environments

Mohammad H. Asadian, Danmeng Wang, Yusheng Wang, Andrei M. Shkel

Peer Reviewed

Abstract: This paper presents the recent advancements in the development of three-dimensional fused quartz dual-shell microresonators for environmentally-challenging applications, where the precision measurements are made through shock and vibrations. The dual-shell micro-resonators made from fused quartz and demonstrate a mechanical Q-factor of well above 1 million. An integration and assembly process for capacitive actuation and detection of such resonators using a silicon-in-glass electrode substrate was developed, and electrostatic tuning of n=2 wineglass using out-of-plane electrodes was demonstrated experimentally. We also present a simulation framework based on the Finite Element Method. The modeling approach was used to derive the critical design parameters of the dual-shell micro-gyroscopes for survivability under harsh shock waveforms. The developed 3D dual-shell structure is a potential solution for microresonators and gyroscopes for operation in harsh environments.
Published in: 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS)
April 20 - 23, 2020
Hilton Portland Downtown
Portland, Oregon
Pages: 1467 - 1471
Cite this article: Asadian, Mohammad H., Wang, Danmeng, Wang, Yusheng, Shkel, Andrei M., "3D Dual-Shell Micro-Resonators for Harsh Environments," 2020 IEEE/ION Position, Location and Navigation Symposium (PLANS), Portland, Oregon, April 2020, pp. 1467-1471. https://doi.org/10.1109/PLANS46316.2020.9109972
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