Title: Design and Fabrication of High-Q Birdbath Resonator for MEMS Gyroscopes
Author(s): Sajal Singh, Tal Nagourney, Jae Yoong Cho, Ali Darvishian, Behrouz Shiari, Khalil Najafi
Published in: Proceedings of IEEE/ION PLANS 2018
April 23 - 26, 2018
Hyatt Regency Hotel
Monterey, CA
Pages: 15 - 19
Cite this article: Singh, Sajal, Nagourney, Tal, Cho, Jae Yoong, Darvishian, Ali, Shiari, Behrouz, Najafi, Khalil, "Design and Fabrication of High-Q Birdbath Resonator for MEMS Gyroscopes," Proceedings of IEEE/ION PLANS 2018, Monterey, CA, April 2018, pp. 15-19.
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Abstract: We present the design, fabrication, and measurement results of an axisymmetric 3D micro-shell resonator called the birdbath resonator. Three classes of birdbath resonators are studied; all exhibiting a record performance in terms of high-quality factor and long ring down time constants for their sizes. We also show that such high performing resonators have the potential to achieve low angle random walk and bias instability, achieving navigation-grade performance.