Design and Fabrication of High-Q Birdbath Resonator for MEMS Gyroscopes

Sajal Singh, Tal Nagourney, Jae Yoong Cho, Ali Darvishian, Behrouz Shiari, Khalil Najafi

Abstract: We present the design, fabrication, and measurement results of an axisymmetric 3D micro-shell resonator called the birdbath resonator. Three classes of birdbath resonators are studied; all exhibiting a record performance in terms of high-quality factor and long ring down time constants for their sizes. We also show that such high performing resonators have the potential to achieve low angle random walk and bias instability, achieving navigation-grade performance.
Published in: 2018 IEEE/ION Position, Location and Navigation Symposium (PLANS)
April 23 - 26, 2018
Hyatt Regency Hotel
Monterey, CA
Pages: 15 - 19
Cite this article: Singh, Sajal, Nagourney, Tal, Cho, Jae Yoong, Darvishian, Ali, Shiari, Behrouz, Najafi, Khalil, "Design and Fabrication of High-Q Birdbath Resonator for MEMS Gyroscopes," 2018 IEEE/ION Position, Location and Navigation Symposium (PLANS), Monterey, CA, April 2018, pp. 15-19.
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