Miniaturized Angular Rate Sensor With Laminated Quartz Tuning Fork

Hiroshi Uehara, Takahiro Ohtsuka, Takahiro Inoue, Masahiro Yoshimatu, Hideryo Matudo, Masanobu Okazaki

Abstract:	We have developed a small surface mount type angular rate sensor (5.0x3.2x1.3mm) with a miniaturized quartz tuning fork sensor element (3.7x0.94x0.24mm) which was manufactured from a laminated quartz wafers. The miniaturized new sensor indicated the following results.
Published in:	Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting August 29 - 31, 2005 Vancouver, Canada
Pages:	886 - 891
Cite this article:	Uehara, Hiroshi, Ohtsuka, Takahiro, Inoue, Takahiro, Yoshimatu, Masahiro, Matudo, Hideryo, Okazaki, Masanobu, "Miniaturized Angular Rate Sensor With Laminated Quartz Tuning Fork," Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting, Vancouver, Canada, August 2005, pp. 886-891.
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