Changing Process of Two Convex-Lens Shape Resonators on One Quartz Blank

Zen-ichiro Nagaura, Kumiko Nagaura, Kazutake Imani, Yoshiaki Nagaura

Abstract:	Our research objective is to make two single-sided inverted-mesa type concave resonators on a quartz blank by etching process for bio-sensors and so forth. Then three kind of concave blanks were made for different resonating frequencies. By using dual-face polishing machine, the first blank was formed to be concave as 0.5 µm from front and rear sides (total 1.0 µm), the second one as 1.0 µm and the third one as 1.5 µm. The rear side of every concave blank was naturally made to be in convex lens shape. The changing height of convex lens shape blank was related to every quantity of polished quartz. Furthermore, the electrical property of every quartz resonator was reported to correspond to every polished amount of quartz.
Published in:	Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting August 29 - 31, 2005 Vancouver, Canada
Pages:	588 - 593
Cite this article:	Nagaura, Zen-ichiro, Nagaura, Kumiko, Imani, Kazutake, Nagaura, Yoshiaki, "Changing Process of Two Convex-Lens Shape Resonators on One Quartz Blank," Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting, Vancouver, Canada, August 2005, pp. 588-593.
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