Laser-Incident Angle Optimization for Measuring In-Plane Mode Shapes in Piezoelectric Resonators with Polished Surfaces

Yasuaki Watanabe, Shigeyoshi Goka, Hitoshi Sekimoto, Toru Yamamoto

Abstract: Based on an optical reflection model in polished multilayered surfaces, reflectance and transmittance for the incident angle of the laser beam have been analyzed. The analysis demonstrates that the laser incident angle used in the previous experiment is optimum for measuring in-plane mode shapes in polished resonators with gold and chrome electrodes.
Published in: Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting
August 29 - 31, 2005
Vancouver, Canada
Pages: 160 - 163
Cite this article: Watanabe, Yasuaki, Goka, Shigeyoshi, Sekimoto, Hitoshi, Yamamoto, Toru, "Laser-Incident Angle Optimization for Measuring In-Plane Mode Shapes in Piezoelectric Resonators with Polished Surfaces," Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting, Vancouver, Canada, August 2005, pp. 160-163.
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