Self-Switching Vibrating Micromechanical Filter Bank

Sheng-Shian Li, Yu-Wei Lin, Zeying Ren, Clark T.-C. Nguyen

Abstract:	Bridged MEMS-based micromechanical filters have been demonstrated that use a self-switching property of their dc-biased capacitive transducers to achieve zero-loss on/off filter switching without the need for lossy series switches, and with settling times down to 1.5 µs. By dispensing with the need for series switches in the signal path, a small bank of 0.087% bandwidth, 9-MHz beam-based filters has achieved programmable channel/band selection with only 3 dB of insertion loss, comprised entirely of filter loss (i.e., no switch loss), with switching times 7x faster than the typical 10 µs of some of the fastest RF MEMS switches, and without the high actuation voltages (>90V) and reliability issues often associated with RF MEMS switches. Higher frequency 155-MHz disk resonators achieve even faster switching speeds, with settling times down to only 430 ns. Equipped with this self-switching property, capacitively transduced micromechanical resonators are attractive candidates for realization of the switchable filter banks targeted for future wireless transceivers.
Published in:	Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting August 29 - 31, 2005 Vancouver, Canada
Pages:	135 - 141
Cite this article:	Li, Sheng-Shian, Lin, Yu-Wei, Ren, Zeying, Nguyen, Clark T.-C., "Self-Switching Vibrating Micromechanical Filter Bank," Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting, Vancouver, Canada, August 2005, pp. 135-141.
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