High-frequency Bulk Acoustic Resonant Microbalances in Liquid

Hao Zhang, Wei Pang, Eun Sok Kim

Abstract:	In this paper, we present two types of high-frequency bulk acoustic resonant microbalances based on (1) Film Bulk Acoustic Resonator (FBAR) and (2) High-tone Bulk Acoustic Resonator (HBAR). Both resonators are operating at about 900 MHz, hundred times higher than a typical Quartz Crystal Microbalance (QCM). Mass sensitivities of the FBAR and HBAR microbalances are measured to be 782.7 (50 times larger than that of QCM) and 9.3 cm2/g, respectively. The minimum detectable frequency changes for the FBAR and HBAR are measured to be about 2 and 0.1 kHz, respectively. Based on the mass sensitivities and minimum detectable frequency changes, the minimum detectable mass change for the FBAR and HBAR are estimated to be 4 ng/cm2 (comparable to that of QCM) and 10 ng/cm2, respectively.
Published in:	Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting August 29 - 31, 2005 Vancouver, Canada
Pages:	73 - 77
Cite this article:	Zhang, Hao, Pang, Wei, Kim, Eun Sok, "High-frequency Bulk Acoustic Resonant Microbalances in Liquid," Proceedings of the 37th Annual Precise Time and Time Interval Systems and Applications Meeting, Vancouver, Canada, August 2005, pp. 73-77.
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