Mode-Matched MEMS Coriolis Vibratory Gyroscopes: Myth or Reality?

Igor P. Prikhodko, Jeffrey A. Gregory, William Clark, John A. Geen, Michael W. Judy, Chae H. Ahn, Thomas W. Kenny

Abstract:	The majority of commercial MEMS gyroscopes are operated in a mode-split condition where the drive and sense modes are intentionally mismatched in frequency, thus prioritizing gain stability and allowing for wide bandwidth but often sacrificing the noise density. In mode-matched operation, the gyroscope gain depends on sense-mode Q-factor, which improves the noise and scale-factor of MEMS gyroscopes. The scale-factor and offset stability over environment, however, also depend on the frequency matching, calling for the development of a mode-matching loop. Here we proposed a mode-matching loop which relies on monitoring the Coriolis channel output in response to the quadrature electrode dither. We have experimentally demonstrated an order of magnitude improvement in in-run bias instability and stress sensitivity when the mode-matching loop was employed, demonstrating a path towards mode-matched MEMS gyroscope with low-noise, wide measurement bandwidth, and offset stability over environment.
Published in:	Proceedings of IEEE/ION PLANS 2016 April 11 - 14, 2016 Hyatt Regency Hotel Savannah, GA
Pages:	1 - 4
Cite this article:	Prikhodko, Igor P., Gregory, Jeffrey A., Clark, William, Geen, John A., Judy, Michael W., Ahn, Chae H., Kenny, Thomas W., "Mode-Matched MEMS Coriolis Vibratory Gyroscopes: Myth or Reality?," Proceedings of IEEE/ION PLANS 2016, Savannah, GA, April 2016, pp. 1-4. https://doi.org/10.1109/PLANS.2016.7479674
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