Optimizing Noise and Stability of MEMS Accelerometers for Various Applications

John Cole, Andy Cunningham, Rob MacDonald, Sandra McGimpsey, Sarah McQuaide, Darby McShain

Abstract:	The small signal levels provided by the limited size and inertial mass of miniature, open-loop MEMS accelerometers provide a challenging problem to achieve low noise and high stability needed for navigation and other applications. The challenge is made more difficult when different applications need to operate at a wide range of different peak g-levels. This paper discusses the performance achieved with six models of accelerometers recently introduced, built with a family of sense elements that optimize the sense element sensitivity to match the glevels needed. It shows the measured performance of models designed to cover a subset of the range from 2 to 100 G, and it shows how different error sources are reflected in the Allan Deviation curves for the different glevel accelerometers.
Published in:	Proceedings of IEEE/ION PLANS 2016 April 11 - 14, 2016 Hyatt Regency Hotel Savannah, GA
Pages:	9 - 14
Cite this article:	Cole, John, Cunningham, Andy, MacDonald, Rob, McGimpsey, Sandra, McQuaide, Sarah, McShain, Darby, "Optimizing Noise and Stability of MEMS Accelerometers for Various Applications," Proceedings of IEEE/ION PLANS 2016, Savannah, GA, April 2016, pp. 9-14. https://doi.org/10.1109/PLANS.2016.7479676
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