Environmentally-Robust High-Performance Tri-axial Bulk Acoustic Wave Gyroscopes

Diego Emilio Serrano, Ron Lipka, Duane Younkin, Peter Hrudey, J. Tovera, Amir Rahafrooz, M. Faisal Zaman, Shin Nagpal, Ijaz Jafri, Farrokh Ayazi

Abstract:	This paper reports on the design and characterization of the first commercially-available tri-axial rotation-rate sensor implemented by the use of substrate-decoupled bulk acoustic wave (SD-BAW) gyroscopes. Owed to their high-frequency of operation (4.3 MHz), these devices exhibit significantly reduced dependencies on environmental stimuli such as vibration and shock. The sensor consists of three separate, but identical, waferlevel packaged (WLP) gyros, each of which is oriented along the X, Y and Z axes for 3-axis detection. The three gyro dies are cointegrated in a 7 mm x 7 mm x 2.9 mm cavity package with an application specific integrated circuit (ASIC) responsible for signal actuation, readout, control of the device. With a scale factor of 3 mV/(º/s), the complete system attains a full-scale range (±300 º/s) with non-linearity of 0.05%. Furthermore, integration of all dies in the same package facilitates achieving low cross-axis sensitivity of less than 1%. Values as low as 0.17 º/?h of anglerandom walk (ARW) and 10.5 º/h of bias-instability (BI) have been measured; these are dominated by the thermal and 1/f noise of the ASIC, respectively.
Published in:	Proceedings of IEEE/ION PLANS 2016 April 11 - 14, 2016 Hyatt Regency Hotel Savannah, GA
Pages:	5 - 8
Cite this article:	Serrano, Diego Emilio, Lipka, Ron, Younkin, Duane, Hrudey, Peter, Tovera, J., Rahafrooz, Amir, Zaman, M. Faisal, Nagpal, Shin, Jafri, Ijaz, Ayazi, Farrokh, "Environmentally-Robust High-Performance Tri-axial Bulk Acoustic Wave Gyroscopes," Proceedings of IEEE/ION PLANS 2016, Savannah, GA, April 2016, pp. 5-8. https://doi.org/10.1109/PLANS.2016.7479675
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