A Practical Guide to MEMS Inertial Sensors

Alissa M. Fitzgerald

Abstract:	Summary: • MEMS fabrication technology enabled low-cost, small form-factor inertial sensors - Wide variety of device architectures and specifications - Broad adoption in consumer-grade applications in just 6 years due to low cost • Current sensor performance limited by current architecture and manufacturing methods - Not likely to reach beyond Tactical Grade without technology shift
Published in:	Proceedings of the 28th International Technical Meeting of the Satellite Division of the Institute of Navigation (ION GNSS+ 2015) September 14 - 18, 2015 Tampa Convention Center Tampa, Florida
Pages:	137 - 159
Cite this article:	Fitzgerald, Alissa M., "A Practical Guide to MEMS Inertial Sensors," Proceedings of the 28th International Technical Meeting of the Satellite Division of the Institute of Navigation (ION GNSS+ 2015), Tampa, Florida, September 2015, pp. 137-159.
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