Ratio-metric Readout Technique for MEMS Gyroscopes with Force Feedback

B. Eminoglu, M.H. Kline, I. Izyumin,  Y-C. Yeh, B.E. Boser

Abstract:	This paper presents a ratio-metric readout technique for force-feedback gyroscopes that achieves a precise scale factor. The drive mode self-oscillation loop is modified to continuously estimate the scale factor to track and reject changes of the drive mode velocity and proof mass voltage. Experiments demonstrate a twenty-fold reduction of scale factor variations and the suppression of the turn-on transient. The device achieves an angle random walk of 5.3 mdeg/rt-s and a bias stability of 3 deg/hr.
Published in:	Proceedings of IEEE/ION PLANS 2014 May 5 - 8, 2014 Hyatt Regency Hotel Monterey, CA
Pages:	1203 - 1208
Cite this article:	Eminoglu, B., Kline, M.H., Izyumin, I., Yeh,  Y-C., Boser, B.E., "Ratio-metric Readout Technique for MEMS Gyroscopes with Force Feedback," Proceedings of IEEE/ION PLANS 2014, Monterey, CA, May 2014, pp. 1203-1208. https://doi.org/10.1109/PLANS.2014.6851493
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