In-Run Bias Self-Calibration for Low-Cost MEMS Vibratory Gyroscopes

I.P. Prikhodko, J.A. Gregory, C. Merritt, J.A. Geen, J. Chang, J. Bergeron, W. Clark, M.W. Judy

Abstract: We present a method for improving bias instability and Rate Random Walk (RRW) in low-cost MEMS vibratory gyroscopes by periodically reversing polarity of the resonator drive force, yielding a 5 times reduction of RRW noise. The feasibility of the approach was experimentally evaluated using an in-production Analog Devices ADXRS800, a fully integrated MEMS gyroscope with a quadruple mass architecture. The proposed method is to use periods of alternating co-phase and anti-phase drive clock to drive-mode oscillation periods, and sampling the gyroscope sense-mode output during the equal times of co-phase anti-phase drive of the resonator, thereby canceling the drive alignment bias error term. The proposed self-calibration method allows for long and short term stability improvement in low-cost and high performance MEMS vibratory gyroscopes.
Published in: Proceedings of IEEE/ION PLANS 2014
May 5 - 8, 2014
Hyatt Regency Hotel
Monterey, CA
Pages: 515 - 518
Cite this article: Prikhodko, I.P., Gregory, J.A., Merritt, C., Geen, J.A., Chang, J., Bergeron, J., Clark, W., Judy, M.W., "In-Run Bias Self-Calibration for Low-Cost MEMS Vibratory Gyroscopes," Proceedings of IEEE/ION PLANS 2014, Monterey, CA, May 2014, pp. 515-518.
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