A MEM Vibratory Gyro with Mode-matching Achieved by Resonator Mass Loading

D. Kim and R. Mcloskey

Abstract: This paper presents preliminary performance results for a vibratory rate gyro based on a novel MEM resonator whose design facilitates frequency mismatch reduction via mass loading. A model–based systematic tuning algorithm was implemented to reduce the n=2 modal frequency mismatch without impacting the quality factors. Mass loading the resonator eliminates the need for electrostatic tuning and only a single bias voltage to the resonator is required for operation as a rate sensor. Force–to–rebalance operation with a 10Hz bandwidth yielded a minimum rate bias instability of 0.11deg/hr and an estimated angle random walk of 0.02deg/root-hr. A decrease in rate noise was also demonstrated as the sensor’s cross–channel coupling was reduced by aligning the forcer/pick–off frame with the anti–nodes of the modes.
Published in: Proceedings of IEEE/ION PLANS 2014
May 5 - 8, 2014
Hyatt Regency Hotel
Monterey, CA
Pages: 499 - 503
Cite this article: Kim, D., Mcloskey, R., "A MEM Vibratory Gyro with Mode-matching Achieved by Resonator Mass Loading," Proceedings of IEEE/ION PLANS 2014, Monterey, CA, May 2014, pp. 499-503.
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