Micromachined Angular Rate Sensor Allowing Interchangeable Operation in Both Amplitude Modulation and Frequency Modulation

Y. Hao, B. Liu, C. Yu, G. Zhou

Abstract:	The paper reports a novel design of MEMS vibratory gyroscope. The gyroscope consists of multi-mass. The proposed angular sensor can be operated in both amplitude modulation (AM) and frequency modulation (FM). The proposed gyroscope can work as a 2-degree of freedom (DOF) gyroscope or a 3-DOF gyroscope. When the sensor works as a 2-DOF gyroscope, the simulation shows that the sensitivity is high and the bandwidth is narrow. When the sensor works as a 3-DOF gyroscope, the simulation shows that the sensitivity is low and the bandwidth is improved to 900Hz in drive-mode.
Published in:	Proceedings of IEEE/ION PLANS 2014 May 5 - 8, 2014 Hyatt Regency Hotel Monterey, CA
Pages:	147 - 151
Cite this article:	Hao, Y., Liu, B., Yu, C., Zhou, G., "Micromachined Angular Rate Sensor Allowing Interchangeable Operation in Both Amplitude Modulation and Frequency Modulation," Proceedings of IEEE/ION PLANS 2014, Monterey, CA, May 2014, pp. 147-151. https://doi.org/10.1109/PLANS.2014.6851368
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