Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System

A.A. Trusov, G. Atikyan, D.M. Rozelle, A.D. Meyer, S.A. Zotov, B.R. Simon, A.M. Shkel

Abstract:	This paper presents detailed performance status, modeling, and projections for the silicon MEMS Quadruple Mass Gyroscope (QMG) – a unique high Q, lumped mass, mode-symmetric Class II Coriolis Vibratory Gyroscope (CVG) with interchangeable whole angle, self-calibration, and force rebalance mechanizations. To support experimental work, a standalone CVG control and test suite was developed and implemented, comprising a packaged MEMS transducer, an analog buffer card, a digital control card, HRG-style real time closed loop control firmware, and a PC GUI for test control and data logging. Analysis of a QMG sealed without getter with a Q-factor of 1e3 reveals an Angle Random Walk (ARW) of 0.02 deg/rt-hr limited only by the fundamental Mechanical-Thermal Noise (MTN). Propagation of a detailed noise model to a QMG sealed with getter at a Q-factor of 1e6 (previously demonstrated) showed better than Navigation Grade ARW of 0.001 deg/rt-hr. Combination of the very low ARW with the mode-symmetry enabled self-calibration substantiates the navigation grade performance capacity of the Si-MEMS QMG.
Published in:	Proceedings of IEEE/ION PLANS 2014 May 5 - 8, 2014 Hyatt Regency Hotel Monterey, CA
Pages:	252 - 258
Cite this article:	Trusov, A.A., Atikyan, G., Rozelle, D.M., Meyer, A.D., Zotov, S.A., Simon, B.R., Shkel, A.M., "Flat Is Not Dead: Current and Future Performance of Si-MEMS Quad Mass Gyro (QMG) System," Proceedings of IEEE/ION PLANS 2014, Monterey, CA, May 2014, pp. 252-258. https://doi.org/10.1109/PLANS.2014.6851383
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