Precision Micromechanical Gyro: Pathway to Advance

Vderian P. Doronin, Alexander P. Mesentsev, Anatoly S. Neapolitansky, Leonid Z. Novikov

Abstract:	An idea of vibratory gyroscope of fifties [ll did not be implemented into a marketing product in spite of considerable efforts of many engineer8 and scientists. Such a failure to create an nsefnl angalar rate sensor may be explained by lack of sound material science and technological foundation. However in the Iast decade new regeneration8 of some old ideas are observed. The old idea of vibratory gyro being combined with modern achievement8 in ,material science and micromachining technology produces a new class of gyros, namely, a micromechanical vibratory gyro (MMVG). Analysis of papers published in the last decade [2-71 shows that inventors, designers, and manufacturer8 of MMVG prefer to solve, in the first place, such problem8 as reducing cost, sise, and power consumption. The accuracy of MMVG is considered in this approach as secondary item. This trend in MMVG development is defined by formation of new markets (in automotive industry, for example) and a strong desire of producer8 to conquest them. Now a question arises about potential accuracy of MMVG characterised, in the first place, by a sensitivity treshold and drift stability in continuous run. To get a definite answer it is worthwhile to release strict limitation8 on cost, size, and power consnmp tion, but to retain all the advantage8 of microelectronic silicon technology application. In this paper the results of MMVG computer simulation are presented showing that MMVG fabricated from silicon by micromachining technology may provide drift stability in continuous run comparable with that of traditional dynamically tuned (DTG), laser (LG), and floated (FG) gyros. Besides, maximal dimension of single axis MMVG gyro is about of 10 mm and its power connsumption is about of 0.1 W.
Published in:	Proceedings of the 52nd Annual Meeting of The Institute of Navigation (1996) June 19 - 21, 1996 Royal Sonesta Hotel Cambridge, MA
Pages:	469 - 475
Cite this article:	Doronin, Vderian P., Mesentsev, Alexander P., Neapolitansky, Anatoly S., Novikov, Leonid Z., "Precision Micromechanical Gyro: Pathway to Advance," Proceedings of the 52nd Annual Meeting of The Institute of Navigation (1996), Cambridge, MA, June 1996, pp. 469-475.
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