TCMO™: A Versatile MEMS Oscillator Timing Platform

K. J. Schoepf , R. Rebel, D. M. Chen, G. Zolfagharkhani, A. Gaidarzhy, J. H. Kuypers, M. Crowley, and P. Mohanty

Abstract:	This paper demonstrates the first MEMS oscillator with a performance comparable to a temperature-compensated crystal oscillator (TCXO) in frequency accuracy, temperature stability, and phase noise. The presented temperature-compensated MEMS oscillator (TCMO™) achieves –116 dBc/Hz phase noise at 1 kHz offset from the 123.9 MHz carrier, relating to a phase noise value of -135.6 dBc/Hz at 1 kHz offset at 13 MHz. The temperature drift of the MEMS oscillator is within ±2.5 ppm over the entire operating temperature range from –40°C to +85°C. The TCMO™ uses a unique circuit architecture for an analog temperature compensation so that the output frequency does not suffer from frequency or phase discontinuities.
Published in:	Proceedings of the 41st Annual Precise Time and Time Interval Systems and Applications Meeting November 16 - 19, 2009 Hyatt Regency Tamaya Resort Santa Ana Pueblo, New Mexico
Pages:	481 - 492
Cite this article:	Schoepf, K. J., Rebel, R., Chen, D. M., Zolfagharkhani, G., Gaidarzhy, A., Kuypers, J. H., Crowley, M., Mohanty, P., "TCMO™: A Versatile MEMS Oscillator Timing Platform," Proceedings of the 41st Annual Precise Time and Time Interval Systems and Applications Meeting, Santa Ana Pueblo, New Mexico, November 2009, pp. 481-492.
Full Paper:	ION Members/Non-Members: 1 Download Credit Sign In