Breakthrough in High Performance Inertial Navigation Grade Sigma-Delta MEMS Accelerometer

P. Zwahlen, Y. Dong, A-M Nguyen, F. Rudolf, J-M Stauffer, P. Ullah, V. Ragot

Abstract:	In this paper, we report a Sigma-Delta MEMS navigation grade accelerometer, which, to our knowledge, is the first reported MEMS accelerometer to reach navigation grade performances. This reported system encompasses a high stability and high shock resistance mechanical MEMS sensor, a 5th-order sigma-delta closed-loop electronic with digital loop filtering and high stability voltage reference. Reported performances for a full scale range of 15g, with shock survivability up to 4000g, are a 10 µg bias stability under warm-up, a bias temperature slope below 200 µg/°C, a scale factor temperature slope below 100 ppm/°C, 2nd order non-linearity below 20 µg/g2 up to 1 kHz and a white noise floor below 2µg/vHz. The reported performances make this accelerometer of the same class as the traditional macro electro-mechanical quartz accelerometer.
Published in:	Proceedings of IEEE/ION PLANS 2012 April 24 - 26, 2012 Myrtle Beach Marriott Resort & Spa Myrtle Beach, South Carolina
Pages:	15 - 19
Cite this article:	Zwahlen, P., Dong, Y., Nguyen, A-M, Rudolf, F., Stauffer, J-M, Ullah, P., Ragot, V., "Breakthrough in High Performance Inertial Navigation Grade Sigma-Delta MEMS Accelerometer," Proceedings of IEEE/ION PLANS 2012, Myrtle Beach, South Carolina , April 2012, pp. 15-19. https://doi.org/10.1109/PLANS.2012.6236858
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