ELECTROSTATICALLY FORCE-BALANCED SILICON ACCELEROMETER

Keith Warren

Peer Reviewed

Abstract: A low-cost silicon accelerometer intended for use in tactical missile and multisensor applications :is presented. The proof mass, flexure, and frame structure are anisotropically etched from single-crystal silicon using semiconductor batch processing to yield 109 devices per wafer. This small, rugged accelerometer has inherently high gas damping, which is used to eliminate structural resonances. The accelerometer chips have been assembled into triad housings, along with hybrid preamp electronics, for testing. Test data on 10 g full scale devices is presented; 100 g range accelerometers are being developed.
Published in: NAVIGATION, Journal of the Institute of Navigation, Volume 38, Number 1
Pages: 89 - 98
Cite this article: Warren, Keith, "ELECTROSTATICALLY FORCE-BALANCED SILICON ACCELEROMETER", NAVIGATION, Journal of The Institute of Navigation, Vol. 38, No. 1, Spring 1991, pp. 89-98.
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