Session A3: Advances in MEMS-based Inertial Sensors and Inertial Measurement Units


Date: Wednesday, April 26, 2023
Time: 8:30 a.m. - 12:15 p.m.
Location: Spyglass

Session Chairs:
Dr. Andrei Shkel
University of California, Irvine
Dr. Adam Schofield
Army Research Lab

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1. Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations: David Lin, Robert Macdonald, Jeremy Popp, Matthew Alberda, Emad Andarawis, Marco Aimi, GE Aerospace
2. Manufacturing Platform for High-Performance MEMS Inertial Sensors: Jeffrey DeNatale and Philip Stupar, Teledyne Scientific & Imaging; Stephane Martel and Jonathan Lachance, Teledyne DALSA Semiconductor, Inc.
3. Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance: Nicholas A. Strnad, Ryan R. Knight, Ryan Q. Rudy, Robert R. Benoit, Wendy L. Sarney, Jeffrey S. Pulskamp, Sensors and Electron Devices Directorate, DEVCOM Army Research Laboratory
4. Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide: Farrokh Ayazi, Georgia Institute of Technology; Haoran Wen, Gregory Junek, StethX Microsystems; Zhenming Liu, Georgia Institute of Technology; Chris Heaton, StethX Microsystems
5. SiAc(TM) ASIC Module: MEMS Based Accelerometer for Next Generation Inertial Measurement Units: Alexander Trusov, Phillip Clark, Daniel Rampacek, Farzin Dinyarian, Jorge Gutierrez, Victor Akel, Albert Choi, Douglas Meyer, Northrop Grumman
6. State-of-the-Art in MEMS Coriolis Vibratory Gyroscopes with Multi-Degree-of-Freedom Architectures Designed for Dynamic Range, Robustness, and Sensitivity: Andrei M. Shkel, Cenk Acar, Chris Painter, Alex Trusov, Adam Schofield, Sergei Zotov, Igor Prikhodko, Brent Simon, Doruk Senkal, Alexandra Efimovskaya, Danmeng Wang, Sina Askari, Mohammad Asadian, University of California, Irvine
7. Gytrix, a Bulk Quartz PiezoMEMS Gyroscope able to Whole Angle Mode of Operation: O. Le Traon, T. Perrier, R. Levy, J . Guérard, P. Lavenus, A. Andrieux-Ledier, ONERA, Université Paris Saclay
8. Navigation-Grade 3D Fused-Silica Birdbath Resonator Gyroscope (BRG): Khalil Najafi, Jae Yoong Cho, Sajal Singh, Center for Wireless integrated MicroSensors and Systems (WIMS2) University of Michigan

12:15 p.m. – 1:15 p.m. Lunch in the Exhibit Hall