Session A3: Advances in MEMS-based Inertial Sensors and Inertial Measurement Units


Date: Wednesday, April 26, 2023
Time: 8:30 a.m. - 12:15 p.m.

Session Chairs:
Dr. Andrei Shkel
University of California, Irvine
Dr. Adam Schofield
Army Research Lab

Atomic Layer Deposition and Sputtering of Piezoelectric Thin Films for Improved IMU Performance: Nicholas A. Strnad, Ryan R. Knight, Ryan Q. Rudy, Robert R. Benoit, Wendy L. Sarney, Jeffrey S. Pulskamp, Sensors and Electron Devices Directorate, DEVCOM Army Research Laboratory
Fully Integrated High-Frequency MEMS and CMOS Inertial Measurement Systems: Taking a Journey from Silicon to Silicon Carbide: Farrokh Ayazi, Georgia Tech
Gytrix, a Bulk Quartz PiezoMEMS Gyroscope able to Whole Angle Mode of Operation: O. Le Traon, T. Perrier, R. Levy, J . Guérard, P. Lavenus, A. Andrieux-Ledier, ONERA, Université Paris Saclay
Low-Cost Navigation-grade MEMS Fabrication Platform to Enable PNT Innovations: David Lin, Robert Macdonald, Jeremy Popp, Matthew Alberda, Dorin Calbaza and Marco Aimi, GE Research
Manufacturing Platform for High-Performance MEMS Inertial Sensors: Jeffrey DeNatale and Philip Stupar, Teledyne Scientific & Imaging; Stephane Martel and Jonathan Lachance, Teledyne DALSA Semiconductor, Inc.
Miniature Silicon Photonics Optical Gyro: Mike Horton, ANELLO Photonics
Navigation-Grade 3D Fused-Silica Birdbath Resonator Gyroscope (BRG): Khalil Najafi, Jae Yoong Cho, Sajal Singh, Center for Wireless integrated MicroSensors and Systems (WIMS2) University of Michigan
SiAc ASIC Module: Next Generation Miniaturized MEMS Based Accelerometer: Phil Clark, Daniel Rampacek, John Douglas, Thomas Fanous, Farzin Dinyarian, Albert Choi, Victor Akel, Doug Meyer, Alex Trusov, Northrop Grumman
State-of-the-Art in MEMS Coriolis Vibratory Gyroscopes with Multi-Degree-of-Freedom Architectures Designed for Dynamic Range, Robustness, and Sensitivity: Andrei M. Shkel, Cenk Acar, Chris Painter, Alex Trusov, Adam Schofield, Sergei Zotov, Igor Prikhodko, Brent Simon, Doruk Senkal, Alexandra Efimovskaya, Danmeng Wang, Sina Askari, Mohammad Asadian, University of California, Irvine

12:15 p.m. – 1:15 p.m. Lunch in the Exhibit Hall