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Session A2: Advances in MEMS-based Inertial Sensors and Inertial Measurement Units (Invited Session)

Micromachined Gyroscopes Made From 3D Molded Fused-Silica Shell Resonators
Khalil Najafi, Jae Yoong Cho, Sajal Singh, Tal Ngourney, Jonk-Kwan Woo, Behrooz Shiari, Ali Darvishian, Center for Wireless integrated MicroSensors and Systems (WIMS2), University of Michigan, Ann Arbor
Location: Pavilion Ballroom East
Date/Time: Tuesday, Apr. 21, 2:35 p.m.

Peer Reviewed

Micro Electro Mechanical Systems technologies have enabled the miniaturization of inertial navigation systems combining acceleration and angular rate sensors (gyroscopes). These MEMS inertial sensors, especially gyroscopes, have made impressive progress in recent years, approaching the performance of the much-larger hemi-spherical resonant gyro (HRG) developed over a few decades ago. The HRG has become the model that many smaller gyroscopes are following. It consists of a three-dimensional axisymmetric fused-silica 2-3cm-diameter resonator with a quality factor of >20 million and excellent noise and stability. It has been used in many defense and space systems. Micromachined structures similar to the HRG with diameter <1cm, and quality factor of 10 million have been fabricated using blow-torching and glass-blowing molding of fused silica and other glass materials. This talk will review the latest research on fabricating high-performance shell resonators. Recent experimental results from a fused-silica precision shell integrating (PSI) gyroscope with a 1cm resonator has provided a packaged Q of >5 million and a measured ARW of 0.00016 deg/?hr and in-run bias stability of 0.0014 deg/hr. This performance, in a device this small, is achieved by optimizing the fabrication of the shell resonator so it provides high Q, large mass, high resonance frequency, and low as-fabricated frequency mismatch.



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