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Session A3a: Advances in MEMS-Based Inertial Sensors and Inertial Measurement Units

Enhancing Silicon-Based Accelerometer Performance Using the f-Squared Method
Theo Miani, Lokesh Gurung, Guillermo Sobreviela-Falces, Colin Baker, Ashwin Seshia, Silicon Microgravity
Location: Deer Valley 1-3
Date/Time: Wednesday, Apr. 30, 8:57 a.m.

This paper presents a comprehensive evaluation of the critical parameters of silicon-based vibrating beam accelerometers (VBA) designed for aerospace applications. The study investigates the impact of applying the f-square method to optimize key performance parameters while ensuring that other critical characteristics remain unaffected. Building upon previous work that introduced the principal parameters of 25g and 100g accelerometers using the f-method [1], as well as prior discussions on the advantages of the f-square method in reducing vibration rectification error [2], this paper extends the analysis by presenting new experimental results on scale factor non-linearity (SFNL) across the full-scale range (FSR).
Keywords— vibrating beam accelerometer, scale factor nonlinearity, f-square method.

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