Compact Short-Term Navigation Grade Quartz MEMS IMU
Sergey Zotov and David Hoyh, EMCORE Corp - Systron Donner Inertial
Date/Time: Thursday, Aug. 26, 10:50 a.m.
EMCORE has demonstrated a 19 cubic inch short-tern navigation grade Inertial Measurement Unit, based on Systron Donner Inertial QMEMS technology, with in-run navigation (for gyro) and in-run strategic (for accelerometer) grade performance. The compact IMU is based on three quartz MEMS Coriolis Vibratory Gyroscopes and three quartz MEMS resonant accelerometers. Experimental characterization of the gyroscopes revealed angle random walk of 0.001 °/rt-hr with bias instability of 0.01 °/hr at stable temperature. The accelerometers demonstrated a velocity random walk on the order of 1 ug/rt-Hz. In parallel with lowering gyroscope and accelerometer noise characteristics, the new bias calibration method across dynamic temperature environments has been implemented. That approach allowed us to improve bias stability over dynamic temperature (-55 °C to +85 °C) better that 0.2 °/hr (1-sigma) for the gyroscope and better that 0.1 mg (1-sigma) for the accelerometer.